Features:
- Enhanced Accuracy and Rapid Response
The CS200 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and advanced models feature a reduced response time of less than 0.8 seconds. - Low Zero Drift and Temperature Coefficient
Utilizing innovative sensor technology, the CS200 MFC maintains stability and withstands temperature fluctuations. Without an auto-zero amplifier, it exhibits minimal zero drift of less than 0.6% F.S./year and a temperature coefficient of less than 0.02% F.S./℃ (zero) and 0.05% F.S./℃ (span). - Metal-Sealed Models and High Purity Feature
The wetted flow path of the CS200 MFC is constructed from surface-passivated stainless steel, ensuring high purity. All CS200 MFCs are assembled in ultraclean Class 100 cleanrooms according to SEMI and ISO 9001 standards. - Compatible Interfaces
The CS200 MFC supports various interfaces that can be selected by the customer, including ±8V to ±16V dual-end power supply or +14V to +28V single-end power supply. It is compatible with digital or analog signal input and output, adheres to SEMI standard mechanical dimensions, and can be equipped with an RS-485 or DeviceNet communications module. - Additional Functions
Each model of the CS200 MFC includes powerful customer software as standard, with additional functions such as support for multi-gas and multi-range applications, auto-zero capability, alarms, soft start, and delay, which can be selected based on customer requirements.
Specification
| CS200 | ||||||||||||
| Type | CS200A | CS200C | CS200D | CS210A | CS210-D | |||||||
| Full scale range (N2) | ( 0～5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM | |||||||||
| ( 0～1,2,3,5,10,20,30,50)SLM | ( 0～1,2,3,5,10,20,30)SLM | ( 0～1,2,3,5,10,20,30,50)SLM | ||||||||||
| Accuracy | ±1.0% S.P. (≥35% F.S.)? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ±0.35% F.S(＜35% F.S.) | |||||||||||
| Linearity | ±0.5% F.S. | |||||||||||
| Repeatability | ±0.2% F.S. | |||||||||||
| Response Time | ≤1sec | ≤0.8 sec (SEMI E17-0600) | ≤1sec | ≤ 0.8 sec (SEMI E17-0600) | ||||||||
| Valve Rest Position | Normally Closed ???or? Normally Open（100 sccm≤F.S.≤5 slm） | No Valve | Normally Closed ???or? Normally Open（100 sccm≤F.S.≤5 slm） | No Valve | Normally Closed ???or | No Valve | Normally Closed? or?? Normally Open（F.S.≤30slm） | No Valve | Normally Closed??? or Normally Open |
No Valve | ||
| Normally Open（100 sccm≤F.S.≤5 slm） | ||||||||||||
| Differential Pressure | 0.05～0.35MPa （Flow≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | (0.05～0.35) MPa（≤10slm） | ＜0.02MPa | 0.05～0.35MPa （Flow≤10slm） 0.1～0.35MPa（10slm＜Flow≤30slm） 0.2～0.45MPa（Flow＞30slm） |
＜0.02MPa | (0.05～0.35) MPa（≤10slm） (0.1～0.35) MPa（＞10slm） |
＜0.02MPa | ||
| 0.1～0.35MPa（10slm＜Flow≤30slm） | (0.1～0.35) MPa（＞10slm） | (0.1～0.35) MPa（＞10slm） | ||||||||||
| 0.2～0.45MPa? （Flow＞30slm） | ||||||||||||
| Maximum Operating Pressure | 0.45MPa | |||||||||||
| Temperature | Zero:≤±0.05% F.S./℃;???????????????????????????? Span: ≤±0.1% F.S./℃ （Flow≤30slm）?????????????????????????? Span: ≤±0.2% F.S./℃（Flow>30slm） | Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃ | Zero:≤±0.05% F.S./℃; Span: ≤±0.1% F.S./℃ （Flow≤30slm） Span: ≤±0.2% F.S./℃ （Flow>30slm） |
Zero:≤±0.02% F.S./℃;??????????????????????? Span:≤±0.05% F.S./℃ | ||||||||
| Coefficient | ||||||||||||
| Proof Pressure | 3MPa? ?(435pisg) | |||||||||||
| Leak integrity | 1×10-9?atm·cc / sec He | 1×10-10atm·cc / sec He | 1×10-9?atm·cc / sec He | 1×10-10?atm·cc / sec He | ||||||||
| Wetted Materials | Viton; | Metal?(Stainless Steel V/V, 5Ra) | Metal | Viton | Metal | |||||||
| Surface Chemistry | —— | Cr/Fe ratio ＞2.0; CrO thickness ＞20 Angstroms | —— | —— | ||||||||
| Surface Finish | 25Ra | 10Ra | 25Ra | |||||||||
| Operation Temperature | （5～45）℃ | （0～50）℃ | （5～45）℃ | （0～50）℃ | ||||||||
| Input Signal | Digital: RS485? or? ProfiBus??? or? ?DeviceNetTM?????????? Analog:(0～5)VDC or (4～20)mA or(0～20)mA | N/A | Digital: RS485 or ProfiBus? or DeviceNetTM?? Analog:(0～5)VDC or (4～20)mA or (0～20)mA | N/A | Digital:RS485 or ProfiBus? or DeviceNetTM?? Analog:(0～5)VDC or (4～20)mA?or (0～20)mA | N/A | Digital: RS485 or? EtherCAT | N/A | Digital: RS485 or? EtherCAT | N/A | ||
| Output Signal | Digital: RS485 or DeviceNetTMor?ProfiBus?or?EtherCAT ? ? ? Analog:(0～5)VDC or (4～20)mA or (0～20)mA | Digital: RS485 or EtherCAT | ||||||||||
| Power Supply | ±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) | +20.4 ~ +26.4 VDC | ||||||||||
| Electronic Connector | 9 pin male sub-D ，15 pin male sub-D ，DeviceNetTM，ProfiBus ，Analog | 9 pin male sub-D , EtherCAT | 9 pin male sub-D , EtherCAT | |||||||||
| Fittings | VCR1/4” M； VCO1/4” M； | VCR1/4” M; | VCR1/4” M； VCO1/4” M； Compression FittingΦ10;Compression FittingΦ6； Compression Fitting 3/8”;? Compression Fitting1/4”； Compression Fitting1/8”; Compression FittingΦ3； Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose; A-sael ; |
VCR1/4” M; Compression FittingΦ6, Compression FittingΦ3, Compression Fitting1/4”， W-seal， C-seal |
||||||||
| Compression FittingΦ10;Compression FittingΦ6； | Compression FittingΦ6, | |||||||||||
| Compression Fitting 3/8”;? Compression Fitting1/4”； | Compression FittingΦ3, | |||||||||||
| Compression Fitting1/8”; Compression FittingΦ3； | Compression Fitting1/4”， | |||||||||||
| Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose; | W-seal， | |||||||||||
| ?A-sael ; | C-seal | |||||||||||
| Weight | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg | 1kg | 0.8kg | 1.2kg | 1kg | ||
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