Features:
- Enhanced Accuracy and Wide Full Scale Range
The CS230 MFC offers improved accuracy with a tolerance of ±1.0% of S.P., and it supports a large full-scale range of up to 300slm. - Low Zero Drift and Temperature Coefficient
Utilizing innovative sensor technology, the CS200 MFC maintains stability and can withstand temperature fluctuations. Without an auto-zero amplifier, it exhibits minimal zero drift of less than 0.6% F.S./year and a temperature coefficient of less than 0.02% F.S./℃ (zero) and 0.05% F.S./℃ (span). - Compatible Interfaces
The CS230 MFC is compatible with various interfaces that can be selected by the customer, including ±8V to ±16V dual-end power supply or +14V to +28V single-end power supply. It supports digital or analog signal input and output, SEMI standard mechanical dimensions, and can be equipped with an RS-485 or DeviceNetTM communications module. - Additional Functions
Each model of the CS230 MFC includes powerful customer software as standard, with optional functions such as support for multi-gas and multi-range applications, auto-zero capability, alarms, soft start, and delay, which can be selected based on customer requirements.
Specification
Type |
CS230A |
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Full scale range (N2) |
(50,100,150,200,250,300) SLM |
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Accuracy |
±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (<35% F.S.) |
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Linearity |
±0.5% F.S. |
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Repeatability |
±0.2% F.S. |
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Response Time |
≤2sec |
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Valve Rest Position |
Normally Closed or Normally Open |
No Valve |
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Differential Pressure |
0.15~0.35MPa 50SLM≤Flow(N2)<150SLM |
50~100SLM:<0.02MPa > 100SLM:<0.05MPa |
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Temperature Coefficient |
Zero:≤±0.05% F.S./℃; Span:≤±0.1% F.S./℃ |
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Maximum Operating Pressure |
1 MPa |
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Max Pressure |
3 MPa (435pisg) |
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Zero Drift |
<0.6%F.S. per year without autozero |
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Leak integrity |
1×10-9 atm·cc / sec He |
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Wetted Materials |
Viton; Neoprene |
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Operation Temperature |
(5~45)℃ |
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Input Signal |
Digital: RS485 or DeviceNetTM or ProfiBus |
N/A |
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Output Signal |
Digital: RS485 or DeviceNetTM or ProfiBus |
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Power Supply |
±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA) |
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Electronic Connector |
9 pin male sub-D ;15 pin male sub-D ; DeviceNetTM male; or ProfiBus |
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Fittings | Compression Fittingφ6;Compression Fitting1/4??;(available to Flow(N2)≤60SLM) Compression Fittingφ8mm(available to Flow(N2)≤ 200SLM) Compression Fitting φ10mm;Compression Fitting 3/8??;Compression Fitting 1/2??;VCR 1/2??; |
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Weight |
2.6kg |
1.5kg |
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